Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors
Publication
, Journal Article
Lillie, JJ; Thomas, MA; Dennis, KA; Jokerst, NM; Henderson, C; Ralph, SE
Published in: Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
December 1, 2004
A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm-long enable fully-integrated sensors with index sensitivities near 3×10 -6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).
Duke Scholars
Published In
Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
352 / 353
Citation
APA
Chicago
ICMJE
MLA
NLM
Lillie, J. J., Thomas, M. A., Dennis, K. A., Jokerst, N. M., Henderson, C., & Ralph, S. E. (2004). Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS, 1, 352–353.
Lillie, J. J., M. A. Thomas, K. A. Dennis, N. M. Jokerst, C. Henderson, and S. E. Ralph. “Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors.” Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS 1 (December 1, 2004): 352–53.
Lillie JJ, Thomas MA, Dennis KA, Jokerst NM, Henderson C, Ralph SE. Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS. 2004 Dec 1;1:352–3.
Lillie, J. J., et al. “Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors.” Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS, vol. 1, Dec. 2004, pp. 352–53.
Lillie JJ, Thomas MA, Dennis KA, Jokerst NM, Henderson C, Ralph SE. Modal pattern analysis and experimental investigation of multimode interferometric sensing: A path to fully integrated silicon-CMOS-based chem/bio sensors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS. 2004 Dec 1;1:352–353.
Published In
Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
352 / 353