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A vacuum system for the production of clean carbon films

Publication ,  Journal Article
Lamvik, MK; Voreades, D; Norton, P; LeFurgey, A; Ingram, P
Published in: Journal of Electron Microscopy Technique
January 1, 1987

A compact, oil‐free vacuum system has been assembled for the production of thin carbon films. Carbon rods are held in a simply constructed and easily cleaned rod holder. Using an unlubricated mechanical roughing pump and one sorption pump, the system is evacuated to the low millitorr range while completely avoiding oil vapors and contaminants that might derive from pump oil. Films produced in such systems are hydrophilic, and analytical electron microscopy measurements have shown that these films are adequately smooth and free of contaminants of both high and low atomic number. Copyright © 1987 Wiley‐Liss, Inc.

Duke Scholars

Published In

Journal of Electron Microscopy Technique

DOI

EISSN

1553-0817

ISSN

0741-0581

Publication Date

January 1, 1987

Volume

5

Issue

2

Start / End Page

153 / 157
 

Citation

APA
Chicago
ICMJE
MLA
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Lamvik, M. K., Voreades, D., Norton, P., LeFurgey, A., & Ingram, P. (1987). A vacuum system for the production of clean carbon films. Journal of Electron Microscopy Technique, 5(2), 153–157. https://doi.org/10.1002/jemt.1060050205
Lamvik, M. K., D. Voreades, P. Norton, A. LeFurgey, and P. Ingram. “A vacuum system for the production of clean carbon films.” Journal of Electron Microscopy Technique 5, no. 2 (January 1, 1987): 153–57. https://doi.org/10.1002/jemt.1060050205.
Lamvik MK, Voreades D, Norton P, LeFurgey A, Ingram P. A vacuum system for the production of clean carbon films. Journal of Electron Microscopy Technique. 1987 Jan 1;5(2):153–7.
Lamvik, M. K., et al. “A vacuum system for the production of clean carbon films.” Journal of Electron Microscopy Technique, vol. 5, no. 2, Jan. 1987, pp. 153–57. Scopus, doi:10.1002/jemt.1060050205.
Lamvik MK, Voreades D, Norton P, LeFurgey A, Ingram P. A vacuum system for the production of clean carbon films. Journal of Electron Microscopy Technique. 1987 Jan 1;5(2):153–157.

Published In

Journal of Electron Microscopy Technique

DOI

EISSN

1553-0817

ISSN

0741-0581

Publication Date

January 1, 1987

Volume

5

Issue

2

Start / End Page

153 / 157