Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures
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, Conference
Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM
Published in: Annual Proceedings - Reliability Physics (Symposium)
July 21, 2003
The effect of Al203 atomic layer deposition (ALD) nanocoatings on the thermo-mechanical behavior of Au/Si microelectromechanical systems (MEMS) structures was discussed. The gold/polysilicon (Au/Si) beam structures were fabricated using the commercially available multi-user MEMS process. It was found that the first thermal cycle of an Au/Si cantilever beam with comparable film thicknesses showed significant nonlinearity and inelasticity in curvature-temperature space.
Duke Scholars
Published In
Annual Proceedings - Reliability Physics (Symposium)
ISSN
0099-9512
Publication Date
July 21, 2003
Start / End Page
463 / 472
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Gall, K., Dunn, M. L., Hulse, M., Finch, D., & George, S. M. (2003). Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In Annual Proceedings - Reliability Physics (Symposium) (pp. 463–472).
Gall, K., M. L. Dunn, M. Hulse, D. Finch, and S. M. George. “Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” In Annual Proceedings - Reliability Physics (Symposium), 463–72, 2003.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In: Annual Proceedings - Reliability Physics (Symposium). 2003. p. 463–72.
Gall, K., et al. “Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” Annual Proceedings - Reliability Physics (Symposium), 2003, pp. 463–72.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. Annual Proceedings - Reliability Physics (Symposium). 2003. p. 463–472.
Published In
Annual Proceedings - Reliability Physics (Symposium)
ISSN
0099-9512
Publication Date
July 21, 2003
Start / End Page
463 / 472