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Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

Publication ,  Conference
Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM
Published in: Annual Proceedings Reliability Physics Symposium
July 21, 2003

The effect of Al203 atomic layer deposition (ALD) nanocoatings on the thermo-mechanical behavior of Au/Si microelectromechanical systems (MEMS) structures was discussed. The gold/polysilicon (Au/Si) beam structures were fabricated using the commercially available multi-user MEMS process. It was found that the first thermal cycle of an Au/Si cantilever beam with comparable film thicknesses showed significant nonlinearity and inelasticity in curvature-temperature space.

Duke Scholars

Ken Gall
Author Ken Gall Thomas Lord Department of Mechanical Engineering and Materia ...

Published In

Annual Proceedings Reliability Physics Symposium

ISSN

0099-9512

Publication Date

July 21, 2003

Start / End Page

463 / 472
 

Citation

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Gall, K., Dunn, M. L., Hulse, M., Finch, D., & George, S. M. (2003). Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In Annual Proceedings Reliability Physics Symposium (pp. 463–472).
Gall, K., M. L. Dunn, M. Hulse, D. Finch, and S. M. George. “Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” In Annual Proceedings Reliability Physics Symposium, 463–72, 2003.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In: Annual Proceedings Reliability Physics Symposium. 2003. p. 463–72.
Gall, K., et al. “Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” Annual Proceedings Reliability Physics Symposium, 2003, pp. 463–72.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. Annual Proceedings Reliability Physics Symposium. 2003. p. 463–472.

Published In

Annual Proceedings Reliability Physics Symposium

ISSN

0099-9512

Publication Date

July 21, 2003

Start / End Page

463 / 472