Ordering in InGaAs/InAlAs layers
Publication
, Journal Article
Zakharov, ND; Liliental-Weber, Z; Swider, W; Washburn, J; Brown, AS; Metzger, R
Published in: Journal of Electronic Materials
December 1, 1993
The structure of InCaAs/InAlAs layers lattice matched to an InP substrate, grown on either (100) or on (110) with a 4° tilt toward [111] at 500 and 300°C has been investigated by transmission electron microscopy. High perfection resulted for the layers grown on [001] oriented substrates whereas growth on the near [110] substrates resulted in compositional nonuniformities, macrosteps formation, and ordering of the group III elements. This difference in structural perfection between the two sets of samples was also reflected in differences in electrical properties. © 1993 The Mineral, Metal & Materials Society, Inc.
Duke Scholars
Published In
Journal of Electronic Materials
DOI
EISSN
1543-186X
ISSN
0361-5235
Publication Date
December 1, 1993
Volume
22
Issue
12
Start / End Page
1495 / 1498
Related Subject Headings
- Applied Physics
- 1099 Other Technology
- 0906 Electrical and Electronic Engineering
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics
Citation
APA
Chicago
ICMJE
MLA
NLM
Zakharov, N. D., Liliental-Weber, Z., Swider, W., Washburn, J., Brown, A. S., & Metzger, R. (1993). Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials, 22(12), 1495–1498. https://doi.org/10.1007/BF02650006
Zakharov, N. D., Z. Liliental-Weber, W. Swider, J. Washburn, A. S. Brown, and R. Metzger. “Ordering in InGaAs/InAlAs layers.” Journal of Electronic Materials 22, no. 12 (December 1, 1993): 1495–98. https://doi.org/10.1007/BF02650006.
Zakharov ND, Liliental-Weber Z, Swider W, Washburn J, Brown AS, Metzger R. Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials. 1993 Dec 1;22(12):1495–8.
Zakharov, N. D., et al. “Ordering in InGaAs/InAlAs layers.” Journal of Electronic Materials, vol. 22, no. 12, Dec. 1993, pp. 1495–98. Scopus, doi:10.1007/BF02650006.
Zakharov ND, Liliental-Weber Z, Swider W, Washburn J, Brown AS, Metzger R. Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials. 1993 Dec 1;22(12):1495–1498.
Published In
Journal of Electronic Materials
DOI
EISSN
1543-186X
ISSN
0361-5235
Publication Date
December 1, 1993
Volume
22
Issue
12
Start / End Page
1495 / 1498
Related Subject Headings
- Applied Physics
- 1099 Other Technology
- 0906 Electrical and Electronic Engineering
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics