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Ordering in InGaAs/InAlAs layers

Publication ,  Journal Article
Zakharov, ND; Liliental-Weber, Z; Swider, W; Washburn, J; Brown, AS; Metzger, R
Published in: Journal of Electronic Materials
December 1, 1993

The structure of InCaAs/InAlAs layers lattice matched to an InP substrate, grown on either (100) or on (110) with a 4° tilt toward [111] at 500 and 300°C has been investigated by transmission electron microscopy. High perfection resulted for the layers grown on [001] oriented substrates whereas growth on the near [110] substrates resulted in compositional nonuniformities, macrosteps formation, and ordering of the group III elements. This difference in structural perfection between the two sets of samples was also reflected in differences in electrical properties. © 1993 The Mineral, Metal & Materials Society, Inc.

Duke Scholars

Published In

Journal of Electronic Materials

DOI

EISSN

1543-186X

ISSN

0361-5235

Publication Date

December 1, 1993

Volume

22

Issue

12

Start / End Page

1495 / 1498

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics
 

Citation

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ICMJE
MLA
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Zakharov, N. D., Liliental-Weber, Z., Swider, W., Washburn, J., Brown, A. S., & Metzger, R. (1993). Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials, 22(12), 1495–1498. https://doi.org/10.1007/BF02650006
Zakharov, N. D., Z. Liliental-Weber, W. Swider, J. Washburn, A. S. Brown, and R. Metzger. “Ordering in InGaAs/InAlAs layers.” Journal of Electronic Materials 22, no. 12 (December 1, 1993): 1495–98. https://doi.org/10.1007/BF02650006.
Zakharov ND, Liliental-Weber Z, Swider W, Washburn J, Brown AS, Metzger R. Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials. 1993 Dec 1;22(12):1495–8.
Zakharov, N. D., et al. “Ordering in InGaAs/InAlAs layers.” Journal of Electronic Materials, vol. 22, no. 12, Dec. 1993, pp. 1495–98. Scopus, doi:10.1007/BF02650006.
Zakharov ND, Liliental-Weber Z, Swider W, Washburn J, Brown AS, Metzger R. Ordering in InGaAs/InAlAs layers. Journal of Electronic Materials. 1993 Dec 1;22(12):1495–1498.
Journal cover image

Published In

Journal of Electronic Materials

DOI

EISSN

1543-186X

ISSN

0361-5235

Publication Date

December 1, 1993

Volume

22

Issue

12

Start / End Page

1495 / 1498

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics