Selective wet etchinq of lithium gallate
Publication
, Journal Article
Kropewnicki, TJ; Doolittle, WA; Carter-Coman, C; Kang, S; Kohl, PA; Jokerst, NM; Brown, AS
Published in: Journal of the Electrochemical Society
January 1, 1998
Lithium gallate (LGO) is an attractive, near lattice matched substrate for the growth of GaN. In addition, LGO substrates provide a convenient route to forming thin films of GaN as used in substrate removal or lift-off processes. We report the wet etching of LGO substrates for the production of GaN thin films. Two face-selective LGO etches have been used for the processing of substrates. The etch rate of the cation face is reported here for the first time and is 0.25 μm min-1 at 50°C. The etching solution is safe and benign to most materials including metallic bonding.
Duke Scholars
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
January 1, 1998
Volume
145
Issue
5
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry
Citation
APA
Chicago
ICMJE
MLA
NLM
Kropewnicki, T. J., Doolittle, W. A., Carter-Coman, C., Kang, S., Kohl, P. A., Jokerst, N. M., & Brown, A. S. (1998). Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society, 145(5). https://doi.org/10.1149/1.1838496
Kropewnicki, T. J., W. A. Doolittle, C. Carter-Coman, S. Kang, P. A. Kohl, N. M. Jokerst, and A. S. Brown. “Selective wet etchinq of lithium gallate.” Journal of the Electrochemical Society 145, no. 5 (January 1, 1998). https://doi.org/10.1149/1.1838496.
Kropewnicki TJ, Doolittle WA, Carter-Coman C, Kang S, Kohl PA, Jokerst NM, et al. Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society. 1998 Jan 1;145(5).
Kropewnicki, T. J., et al. “Selective wet etchinq of lithium gallate.” Journal of the Electrochemical Society, vol. 145, no. 5, Jan. 1998. Scopus, doi:10.1149/1.1838496.
Kropewnicki TJ, Doolittle WA, Carter-Coman C, Kang S, Kohl PA, Jokerst NM, Brown AS. Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society. 1998 Jan 1;145(5).
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
January 1, 1998
Volume
145
Issue
5
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry