Selective wet etchinq of lithium gallate
Journal articles
- Journal Article
Kropewnicki, TJ; Doolittle, WA; Carter-Coman, C; Kang, S; Kohl, PA; Jokerst, NM; Brown, AS
Published in: Journal of the Electrochemical Society
January 1, 1998
Lithium gallate (LGO) is an attractive, near lattice matched substrate for the growth of GaN. In addition, LGO substrates provide a convenient route to forming thin films of GaN as used in substrate removal or lift-off processes. We report the wet etching of LGO substrates for the production of GaN thin films. Two face-selective LGO etches have been used for the processing of substrates. The etch rate of the cation face is reported here for the first time and is 0.25 μm min-1 at 50°C. The etching solution is safe and benign to most materials including metallic bonding.
Duke Scholars
Altmetric Attention Stats
Dimensions Citation Stats
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
January 1, 1998
Volume
145
Issue
5
Start / End Page
L88 / L90
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
Citation
APA
Chicago
ICMJE
MLA
NLM
Kropewnicki, T. J., Doolittle, W. A., Carter-Coman, C., Kang, S., Kohl, P. A., Jokerst, N. M., & Brown, A. S. (1998). Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society, 145(5), L88–L90. https://doi.org/10.1149/1.1838496
Kropewnicki, T. J., W. A. Doolittle, C. Carter-Coman, S. Kang, P. A. Kohl, N. M. Jokerst, and A. S. Brown. “Selective wet etchinq of lithium gallate.” Journal of the Electrochemical Society 145, no. 5 (January 1, 1998): L88–90. https://doi.org/10.1149/1.1838496.
Kropewnicki TJ, Doolittle WA, Carter-Coman C, Kang S, Kohl PA, Jokerst NM, et al. Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society. 1998 Jan 1;145(5):L88–90.
Kropewnicki, T. J., et al. “Selective wet etchinq of lithium gallate.” Journal of the Electrochemical Society, vol. 145, no. 5, Jan. 1998, pp. L88–90. Scopus, doi:10.1149/1.1838496.
Kropewnicki TJ, Doolittle WA, Carter-Coman C, Kang S, Kohl PA, Jokerst NM, Brown AS. Selective wet etchinq of lithium gallate. Journal of the Electrochemical Society. 1998 Jan 1;145(5):L88–L90.
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
January 1, 1998
Volume
145
Issue
5
Start / End Page
L88 / L90
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry