Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors
Publication
, Journal Article
Seo, SW; Cha, C; Cho, SY; Huang, S; Jokerst, NM; Brooke, MA; Brown, AS
Published in: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
December 1, 2004
The enhancement of the impulse response and capacitance performance of thin film InGaAs metal-semiconductor-metal (MSM) was carried out through etching. The capacitances of the MSM were measured using scattering parameter measurements using a lightwave component analyzer. The thin film I-MSM photodetector cladding layers were etched while leaving the adsorbing layers intact. The measured impulse response results show improvement as the thickness of the thin film I-MSMs decrease, which was correlated with the reduction of the capacitance.
Duke Scholars
Published In
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
222 / 223
Citation
APA
Chicago
ICMJE
MLA
NLM
Seo, S. W., Cha, C., Cho, S. Y., Huang, S., Jokerst, N. M., Brooke, M. A., & Brown, A. S. (2004). Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 1, 222–223.
Seo, S. W., C. Cha, S. Y. Cho, S. Huang, N. M. Jokerst, M. A. Brooke, and A. S. Brown. “Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS 1 (December 1, 2004): 222–23.
Seo SW, Cha C, Cho SY, Huang S, Jokerst NM, Brooke MA, et al. Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2004 Dec 1;1:222–3.
Seo, S. W., et al. “Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors.” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1, Dec. 2004, pp. 222–23.
Seo SW, Cha C, Cho SY, Huang S, Jokerst NM, Brooke MA, Brown AS. Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 2004 Dec 1;1:222–223.
Published In
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
222 / 223