Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors
Publication
, Journal Article
Seo, SW; Cha, C; Cho, SY; Huang, S; Jokerst, NM; Brooke, MA; Brown, AS
Published in: Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
December 1, 2004
The enhancement of the impulse response and capacitance performance of thin film InGaAs metal-semiconductor-metal (MSM) was carried out through etching. The capacitances of the MSM were measured using scattering parameter measurements using a lightwave component analyzer. The thin film I-MSM photodetector cladding layers were etched while leaving the adsorbing layers intact. The measured impulse response results show improvement as the thickness of the thin film I-MSMs decrease, which was correlated with the reduction of the capacitance.
Duke Scholars
Published In
Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
222 / 223
Citation
APA
Chicago
ICMJE
MLA
NLM
Seo, S. W., Cha, C., Cho, S. Y., Huang, S., Jokerst, N. M., Brooke, M. A., & Brown, A. S. (2004). Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS, 1, 222–223.
Seo, S. W., C. Cha, S. Y. Cho, S. Huang, N. M. Jokerst, M. A. Brooke, and A. S. Brown. “Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors.” Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS 1 (December 1, 2004): 222–23.
Seo SW, Cha C, Cho SY, Huang S, Jokerst NM, Brooke MA, et al. Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS. 2004 Dec 1;1:222–3.
Seo, S. W., et al. “Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors.” Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS, vol. 1, Dec. 2004, pp. 222–23.
Seo SW, Cha C, Cho SY, Huang S, Jokerst NM, Brooke MA, Brown AS. Etch enhanced low capacitance, large area thin film InGaAs metal-semiconductor-metal photodetectors. Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS. 2004 Dec 1;1:222–223.
Published In
Conference Proceedings Lasers and Electro Optics Society Annual Meeting LEOS
ISSN
1092-8081
Publication Date
December 1, 2004
Volume
1
Start / End Page
222 / 223