Microelectromechanical systems: a new technology for biomedical applications
Publication
, Journal Article
Neuman, MR; Fair, RB; Mehragany, M; Massoud, HZ
Published in: Proceedings of the Annual Conference on Engineering in Medicine and Biology
December 1, 1993
Microelectromechanical systems on a scale as small as a few micrometers can be fabricated using photolithographic and anisotropic etching processes on single crystal substrates such as silicon. Processing steps similar to those used to fabricate integrated circuit chips are used to form these three-dimensional structures. This mini-symposium will examine the underlying physical principles, fabrication processes, and applications for this new technology. Special emphasis will be placed on applications and potential applications in the life sciences and clinical medicine.
Duke Scholars
Published In
Proceedings of the Annual Conference on Engineering in Medicine and Biology
ISSN
0589-1019
Publication Date
December 1, 1993
Volume
15
Issue
pt 3
Start / End Page
1545 / 1546
Citation
APA
Chicago
ICMJE
MLA
NLM
Neuman, M. R., Fair, R. B., Mehragany, M., & Massoud, H. Z. (1993). Microelectromechanical systems: a new technology for biomedical applications. Proceedings of the Annual Conference on Engineering in Medicine and Biology, 15(pt 3), 1545–1546.
Neuman, M. R., R. B. Fair, M. Mehragany, and H. Z. Massoud. “Microelectromechanical systems: a new technology for biomedical applications.” Proceedings of the Annual Conference on Engineering in Medicine and Biology 15, no. pt 3 (December 1, 1993): 1545–46.
Neuman MR, Fair RB, Mehragany M, Massoud HZ. Microelectromechanical systems: a new technology for biomedical applications. Proceedings of the Annual Conference on Engineering in Medicine and Biology. 1993 Dec 1;15(pt 3):1545–6.
Neuman, M. R., et al. “Microelectromechanical systems: a new technology for biomedical applications.” Proceedings of the Annual Conference on Engineering in Medicine and Biology, vol. 15, no. pt 3, Dec. 1993, pp. 1545–46.
Neuman MR, Fair RB, Mehragany M, Massoud HZ. Microelectromechanical systems: a new technology for biomedical applications. Proceedings of the Annual Conference on Engineering in Medicine and Biology. 1993 Dec 1;15(pt 3):1545–1546.
Published In
Proceedings of the Annual Conference on Engineering in Medicine and Biology
ISSN
0589-1019
Publication Date
December 1, 1993
Volume
15
Issue
pt 3
Start / End Page
1545 / 1546