CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION
Publication
, Conference
Chey, SJ; Wei, L; Min, Y; Mitzi, DB
Published in: 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3
January 1, 2009
Duke Scholars
Published In
2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3
ISSN
0160-8371
ISBN
978-1-4244-2949-3
Publication Date
January 1, 2009
Start / End Page
29 / 33
Location
Philadelphia, PA
Publisher
IEEE
Conference Name
34th IEEE Photovoltaic Specialists Conference
Citation
APA
Chicago
ICMJE
MLA
NLM
Chey, S. J., Wei, L., Min, Y., & Mitzi, D. B. (2009). CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION. In 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3 (pp. 29–33). Philadelphia, PA: IEEE.
Chey, S Jay, Liu Wei, Yuan Min, and David B. Mitzi. “CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION.” In 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3, 29–33. IEEE, 2009.
Chey SJ, Wei L, Min Y, Mitzi DB. CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION. In: 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3. IEEE; 2009. p. 29–33.
Chey, S. Jay, et al. “CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION.” 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3, IEEE, 2009, pp. 29–33.
Chey SJ, Wei L, Min Y, Mitzi DB. CHARACTERIZATION OF INDIUM TIN OXIDE AND AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY CONFOCAL RF MAGNETRON SPUTTER DEPOSITION. 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3. IEEE; 2009. p. 29–33.
Published In
2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3
ISSN
0160-8371
ISBN
978-1-4244-2949-3
Publication Date
January 1, 2009
Start / End Page
29 / 33
Location
Philadelphia, PA
Publisher
IEEE
Conference Name
34th IEEE Photovoltaic Specialists Conference