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Mechanical effects of galvanic corrosion of thin film polysilicon

Publication ,  Conference
Miller, DC; Gall, K; Stoldt, CR
Published in: American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
December 1, 2005

Mechanical, and electrical effects generated by the galvanic corrosion of polysilicon immersed in various hydrofluoric acid (HF)-based solutions are described. Micromachined test structures consisting of phosphorus-doped polysilicon in contact with a gold metallization layer are utilized. A suite of otherwise identical test (metal added) and reference (no metal) structures were used to investigate changes in key performance parameters. Corroded test structures demonstrate an increase in through-thickness strain gradient, a decrease in the characteristic frequency of mechanical resonance, no change in in-plane strain, greatly increased electrical resistance, a decrease in hardness, and a decrease in elastic modulus. Noteworthy results were observed for aqueous- hydrochloric acid, ethanol, water, ammonium fluoride (found in buffered oxide etchant), Triton-X-100, as well as vapor-HF based chemistries. This first systematic study validates preliminary experiments and demonstrates the impact of corrosion on miniaturized structures, indicating a potential influence upon the material properties, design, performance, fatigue, tribology (friction/ wear), manufacture, and packaging of micro- and nano-scale devices. Copyright © 2005 by ASME.

Duke Scholars

Published In

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

DOI

ISSN

1096-665X

Publication Date

December 1, 2005

Volume

7 MEMS

Start / End Page

325 / 334
 

Citation

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Miller, D. C., Gall, K., & Stoldt, C. R. (2005). Mechanical effects of galvanic corrosion of thin film polysilicon. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (Vol. 7 MEMS, pp. 325–334). https://doi.org/10.1115/IMECE2005-79295
Miller, D. C., K. Gall, and C. R. Stoldt. “Mechanical effects of galvanic corrosion of thin film polysilicon.” In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, 7 MEMS:325–34, 2005. https://doi.org/10.1115/IMECE2005-79295.
Miller DC, Gall K, Stoldt CR. Mechanical effects of galvanic corrosion of thin film polysilicon. In: American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 325–34.
Miller, D. C., et al. “Mechanical effects of galvanic corrosion of thin film polysilicon.” American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, vol. 7 MEMS, 2005, pp. 325–34. Scopus, doi:10.1115/IMECE2005-79295.
Miller DC, Gall K, Stoldt CR. Mechanical effects of galvanic corrosion of thin film polysilicon. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 325–334.

Published In

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

DOI

ISSN

1096-665X

Publication Date

December 1, 2005

Volume

7 MEMS

Start / End Page

325 / 334