Characterization of semiconductor silicon by transmission electron microscopy
Publication
, Journal Article
Tan, TY
Published in: Proceedings of SPIE - The International Society for Optical Engineering
May 10, 1984
In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispen- sible part of the characterization efforts. © 1984 SPIE.
Duke Scholars
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
EISSN
1996-756X
ISSN
0277-786X
Publication Date
May 10, 1984
Volume
452
Start / End Page
170 / 176
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering
Citation
APA
Chicago
ICMJE
MLA
NLM
Tan, T. Y. (1984). Characterization of semiconductor silicon by transmission electron microscopy. Proceedings of SPIE - The International Society for Optical Engineering, 452, 170–176. https://doi.org/10.1117/12.939302
Tan, T. Y. “Characterization of semiconductor silicon by transmission electron microscopy.” Proceedings of SPIE - The International Society for Optical Engineering 452 (May 10, 1984): 170–76. https://doi.org/10.1117/12.939302.
Tan TY. Characterization of semiconductor silicon by transmission electron microscopy. Proceedings of SPIE - The International Society for Optical Engineering. 1984 May 10;452:170–6.
Tan, T. Y. “Characterization of semiconductor silicon by transmission electron microscopy.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 452, May 1984, pp. 170–76. Scopus, doi:10.1117/12.939302.
Tan TY. Characterization of semiconductor silicon by transmission electron microscopy. Proceedings of SPIE - The International Society for Optical Engineering. 1984 May 10;452:170–176.
Published In
Proceedings of SPIE - The International Society for Optical Engineering
DOI
EISSN
1996-756X
ISSN
0277-786X
Publication Date
May 10, 1984
Volume
452
Start / End Page
170 / 176
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering