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Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon

Publication ,  Journal Article
Tan, TY
Published in: Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon
1986

The author describes in some detail, the nature of an exigent-accommodation-volume factor associated with oxygen (Oi) precipitation in Czochralski (CZ) Si. This factor is regarded as a causal or characteristic factor which influences many aspects of the SiO2 precipitate nucleation and growth phenomena. Employing this factor, he then describes the possible explanations of two outstanding features of Oi precipitation in CZ Si the precipitation retardation/recovery phenomena and the nucleation incubation phenomena

Duke Scholars

Published In

Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon

Publication Date

1986

Start / End Page

269 / 279

Location

Boston, MA, USA
 

Citation

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Tan, T. Y. (1986). Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon. Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon, 269–279.
Tan, T. Y. “Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon.” Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon, 1986, 269–79.
Tan TY. Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon. Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon. 1986;269–79.
Tan, T. Y. “Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon.” Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon, 1986, pp. 269–79.
Tan TY. Exigent-accommodation-volume of precipitation and formation of oxygen precipitates in silicon. Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon. 1986;269–279.

Published In

Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon

Publication Date

1986

Start / End Page

269 / 279

Location

Boston, MA, USA