Static secondary ion mass spectrometry of organic plasma‐deposited films created from stable isotope‐labeled precursors. II. Mixtures of acetone and oxygen
A series of plasma‐deposited films (PDFs), created by blending controlled ratios of acetone vapor and oxygen in the feed to the plasma reactor, were analyzed by static secondary ion mass spectrometry (SIMS). Examination of the quadrupole‐based static SIMS fragmentation patterns of acetone–O2 PDFs created from 13C‐labeled acetone generally allowed the hydrocarbon secondary ions to be distinguished from oxygen‐containing secondary ions. These results were compared with those obtained via high‐mass resolution time‐of‐flight (TOF)‐SIMS. The identified secondary ions were then assigned structural attributes, based on comparison of the static SIMS spectra of the acetone–O2 PDFs with those of conventional hydrocarbon and oxygen‐containing polymers. A preliminary investigation to unravel the mechanism of oxygen incorporation in the acetone–O2 PDFs from the two plasma feed components was undertaken through the analysis of PDFs created from 1,2,313C3‐acetone(16O) vapor and 18O2 gas. Copyright © 1992 John Wiley & Sons, Inc.
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- Polymers
- 3406 Physical chemistry
- 3403 Macromolecular and materials chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry
Citation
Published In
DOI
EISSN
ISSN
Publication Date
Volume
Issue
Start / End Page
Related Subject Headings
- Polymers
- 3406 Physical chemistry
- 3403 Macromolecular and materials chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry