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Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures

Publication ,  Journal Article
Frey, W; Woods, CK; Chilkoti, A
Published in: Adv. Mater. (Germany)
2000

Ultraflat nanopatterned surfaces can be created by combining the techniques of nanosphere lithography and ultraflat template stripping, as highlighted here. In this new method-ultraflat nanosphere lithography (UNSL)-nanostructures of one material are embedded in a matrix of a second material. The feasibility of UNSL is demonstrated for several pairs of materials

Duke Scholars

Published In

Adv. Mater. (Germany)

DOI

Publication Date

2000

Volume

12

Issue

20

Start / End Page

1515 / 1519

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 09 Engineering
  • 03 Chemical Sciences
  • 02 Physical Sciences
 

Citation

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ICMJE
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Frey, W., Woods, C. K., & Chilkoti, A. (2000). Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures. Adv. Mater. (Germany), 12(20), 1515–1519. https://doi.org/10.1002/1521-4095(200010)12:203.0.CO;2-J
Frey, W., C. K. Woods, and A. Chilkoti. “Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures.” Adv. Mater. (Germany) 12, no. 20 (2000): 1515–19. https://doi.org/10.1002/1521-4095(200010)12:203.0.CO;2-J.
Frey W, Woods CK, Chilkoti A. Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures. Adv Mater (Germany). 2000;12(20):1515–9.
Frey, W., et al. “Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures.” Adv. Mater. (Germany), vol. 12, no. 20, 2000, pp. 1515–19. Manual, doi:10.1002/1521-4095(200010)12:203.0.CO;2-J.
Frey W, Woods CK, Chilkoti A. Ultraflat nanosphere lithography: a new method to fabricate flat nanostructures. Adv Mater (Germany). 2000;12(20):1515–1519.

Published In

Adv. Mater. (Germany)

DOI

Publication Date

2000

Volume

12

Issue

20

Start / End Page

1515 / 1519

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 09 Engineering
  • 03 Chemical Sciences
  • 02 Physical Sciences