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Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering

Publication ,  Journal Article
Zara, JM; Gentry, KL; Bobbio, SM; Smith, SW
Published in: Proceedings of SPIE - The International Society for Optical Engineering
January 1, 2001

There is much interest in the biomedical community in mechanically steering both high frequency ultrasound transducers and various optical beams. We are currently investigating the use of two different types of MEMS actuators, integrated force arrays (IFAs) and spiral wound transducers (SWTs). The IFA is a linear actuator that is a parallel network of hundreds of thousands of flexible capacitors that electrostatically contract, and the SWT is a patterned tape that is wound to form a circular network of flexible capacitors that can be electrostatically compressed to tilt desired structures. Using ANSYS finite element analysis, we have developed tilting polyimide support structures, which are fabricated on silicon wafers. High frequency ultrasound transducers (20-30 MHz) have been built on these structures and IFAs used to tilt them to steer the ultrasound beam in fluids. Prototype structures have produced 20 degree sector scans scanning at frequencies up to 30 Hz. IFAs have also been used along with similar support structures to steer optical laser beams up to 45 degrees at frequencies up to 60 Hz. The SWT is a more recent development that operates with much greater force than the IFA that could steer ultrasound and optical beams for similar applications.

Duke Scholars

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

January 1, 2001

Volume

4236

Start / End Page

49 / 57

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
 

Citation

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Zara, J. M., Gentry, K. L., Bobbio, S. M., & Smith, S. W. (2001). Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering. Proceedings of SPIE - The International Society for Optical Engineering, 4236, 49–57. https://doi.org/10.1117/12.418779
Zara, J. M., K. L. Gentry, S. M. Bobbio, and S. W. Smith. “Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering.” Proceedings of SPIE - The International Society for Optical Engineering 4236 (January 1, 2001): 49–57. https://doi.org/10.1117/12.418779.
Zara JM, Gentry KL, Bobbio SM, Smith SW. Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering. Proceedings of SPIE - The International Society for Optical Engineering. 2001 Jan 1;4236:49–57.
Zara, J. M., et al. “Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 4236, Jan. 2001, pp. 49–57. Scopus, doi:10.1117/12.418779.
Zara JM, Gentry KL, Bobbio SM, Smith SW. Synthetic muscle actuators: Applications in ultrasonic imaging and optical beam steering. Proceedings of SPIE - The International Society for Optical Engineering. 2001 Jan 1;4236:49–57.

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

January 1, 2001

Volume

4236

Start / End Page

49 / 57

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering