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Flat, cheap, and under control [electrochemical mechanical planarization]

Publication ,  Journal Article
Brown, AS
Published in: IEEE Spectr. (USA)
2005

This paper describes Applied Material's wafer polishing technology, called electrochemical mechanical planarization (ECMP). ECMP is the answer to the problems of electropolishing and chemical mechanical planarization (CMP) of the chip-making process: manufacturing faster, more powerful chips without obliterating their vanishing fine and increasingly fragile features. It is designed to remove excess copper from the top of a newly formed layer of wiring on a chip without damaging the fragile insulation material, called a dielectric, beneath it. ECMP combines aspects of two other technologies, chemical mechanical planarization (CMP) and electropolishing

Duke Scholars

Published In

IEEE Spectr. (USA)

DOI

Publication Date

2005

Volume

42

Issue

1

Start / End Page

40 / 45

Related Subject Headings

  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
  • 0906 Electrical and Electronic Engineering
 

Citation

APA
Chicago
ICMJE
MLA
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Brown, A. S. (2005). Flat, cheap, and under control [electrochemical mechanical planarization]. IEEE Spectr. (USA), 42(1), 40–45. https://doi.org/10.1109/MSPEC.2005.1377874
Brown, A. S. “Flat, cheap, and under control [electrochemical mechanical planarization].” IEEE Spectr. (USA) 42, no. 1 (2005): 40–45. https://doi.org/10.1109/MSPEC.2005.1377874.
Brown AS. Flat, cheap, and under control [electrochemical mechanical planarization]. IEEE Spectr (USA). 2005;42(1):40–5.
Brown, A. S. “Flat, cheap, and under control [electrochemical mechanical planarization].” IEEE Spectr. (USA), vol. 42, no. 1, 2005, pp. 40–45. Manual, doi:10.1109/MSPEC.2005.1377874.
Brown AS. Flat, cheap, and under control [electrochemical mechanical planarization]. IEEE Spectr (USA). 2005;42(1):40–45.

Published In

IEEE Spectr. (USA)

DOI

Publication Date

2005

Volume

42

Issue

1

Start / End Page

40 / 45

Related Subject Headings

  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
  • 0906 Electrical and Electronic Engineering