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Status and promise of compliant substrate technology

Publication ,  Journal Article
Brown, AS; Doolittle, WA
Published in: Applied Surface Science
October 9, 2000

Compliant substrates offer significant promise as a new approach for strain management in semiconductors. The primary application is to produce device-quality highly mismatched materials on dissimilar substrates. Various implementations and processes for achieving substrate compliancy have been proposed and demonstrated. These include the use of twist-, glass-, and metal-bonds, and the use of engineered templates realized with laterally oxidized Al-containing alloys. A recent focus in our work has been on the growth of GaN on a novel and easily removable substrate - lithium gallate - for regrowth on a bonded GaN template.

Duke Scholars

Published In

Applied Surface Science

DOI

ISSN

0169-4332

Publication Date

October 9, 2000

Volume

166

Issue

1

Start / End Page

392 / 398

Related Subject Headings

  • Applied Physics
 

Citation

APA
Chicago
ICMJE
MLA
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Brown, A. S., & Doolittle, W. A. (2000). Status and promise of compliant substrate technology. Applied Surface Science, 166(1), 392–398. https://doi.org/10.1016/S0169-4332(00)00455-4
Brown, A. S., and W. A. Doolittle. “Status and promise of compliant substrate technology.” Applied Surface Science 166, no. 1 (October 9, 2000): 392–98. https://doi.org/10.1016/S0169-4332(00)00455-4.
Brown AS, Doolittle WA. Status and promise of compliant substrate technology. Applied Surface Science. 2000 Oct 9;166(1):392–8.
Brown, A. S., and W. A. Doolittle. “Status and promise of compliant substrate technology.” Applied Surface Science, vol. 166, no. 1, Oct. 2000, pp. 392–98. Scopus, doi:10.1016/S0169-4332(00)00455-4.
Brown AS, Doolittle WA. Status and promise of compliant substrate technology. Applied Surface Science. 2000 Oct 9;166(1):392–398.
Journal cover image

Published In

Applied Surface Science

DOI

ISSN

0169-4332

Publication Date

October 9, 2000

Volume

166

Issue

1

Start / End Page

392 / 398

Related Subject Headings

  • Applied Physics