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SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION.

Publication ,  Journal Article
Irene, EA; Massoud, HZ; Tierney, E
Published in: Journal of the Electrochemical Society
1986

The initial stage of the thermal oxidation of various crystallographic orientations of silicon (100), (110), and (111) reveals a complex rate behavior. This behavior is not understood within the conventional linear-parabolic model. A recently revised model which explicitly contains the areal density of Si atoms and mechanical stress effects is shown to provide both a qualitative (for all orientations studied) and somewhat quantitative (for (110) and (111) orientations) explanation of the complex substrate orientatin effects.

Duke Scholars

Hisham Z. Massoud
Author Hisham Z. Massoud Electrical and Computer Engineering

Published In

Journal of the Electrochemical Society

Publication Date

1986

Volume

133

Issue

6

Start / End Page

1253 / 1256

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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Irene, E. A., Massoud, H. Z., & Tierney, E. (1986). SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION. Journal of the Electrochemical Society, 133(6), 1253–1256.
Irene, E. A., H. Z. Massoud, and E. Tierney. “SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION.” Journal of the Electrochemical Society 133, no. 6 (1986): 1253–56.
Irene EA, Massoud HZ, Tierney E. SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION. Journal of the Electrochemical Society. 1986;133(6):1253–6.
Irene, E. A., et al. “SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION.” Journal of the Electrochemical Society, vol. 133, no. 6, 1986, pp. 1253–56.
Irene EA, Massoud HZ, Tierney E. SILICON OXIDATION STUDIES: SILICON ORIENTATION EFFECTS ON THERMAL OXIDATION. Journal of the Electrochemical Society. 1986;133(6):1253–1256.

Published In

Journal of the Electrochemical Society

Publication Date

1986

Volume

133

Issue

6

Start / End Page

1253 / 1256

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry