Profile estimation of high-concentration arsenic diffusions in silicon
Publication
, Journal Article
Fair, RB
Published in: Journal of Applied Physics
December 1, 1972
In order to facilitate surface concentration estimation for arsenic diffusion, a simple expression has been derived which is dependent only upon the junction depth xJ and the sheet resistance Rs: C s = 1.56 × 1017/xJRs. This equation was derived from experimental mobility data and a polynomial approximation to the solution of the arsenic diffusion equation. Available data on diffusions carried out from five different kinds of arsenic sources indicate that this derived equation for Cs is accurate to within 15% for Cs≳ni. © 1972 The American Institute of Physics.
Duke Scholars
Published In
Journal of Applied Physics
DOI
ISSN
0021-8979
Publication Date
December 1, 1972
Volume
43
Issue
3
Start / End Page
1278 / 1280
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Fair, R. B. (1972). Profile estimation of high-concentration arsenic diffusions in silicon. Journal of Applied Physics, 43(3), 1278–1280. https://doi.org/10.1063/1.1661253
Fair, R. B. “Profile estimation of high-concentration arsenic diffusions in silicon.” Journal of Applied Physics 43, no. 3 (December 1, 1972): 1278–80. https://doi.org/10.1063/1.1661253.
Fair RB. Profile estimation of high-concentration arsenic diffusions in silicon. Journal of Applied Physics. 1972 Dec 1;43(3):1278–80.
Fair, R. B. “Profile estimation of high-concentration arsenic diffusions in silicon.” Journal of Applied Physics, vol. 43, no. 3, Dec. 1972, pp. 1278–80. Scopus, doi:10.1063/1.1661253.
Fair RB. Profile estimation of high-concentration arsenic diffusions in silicon. Journal of Applied Physics. 1972 Dec 1;43(3):1278–1280.
Published In
Journal of Applied Physics
DOI
ISSN
0021-8979
Publication Date
December 1, 1972
Volume
43
Issue
3
Start / End Page
1278 / 1280
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences