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Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry

Publication ,  Journal Article
López, GP; Chilkoti, A; Briggs, D; Ratner, BD
Published in: Journal of Polymer Science Part A: Polymer Chemistry
January 1, 1992

Static secondary ion mass spectrometry (SIMS) was used to examine the effect of reducing the substrate temperature during the radio frequency plasma deposition of organic films. Studies of two polymerizable plasma precursors (2‐hydroxyethyl methacrylate and acrylic acid) and one nonpolymerizable precursor (acetone) deposited without substrate cooling and with liquid nitrogen cooling are presented. Acetone deposited with methanol/dry ice cooling was also investigated. Spectra of polymerizable precursors were analyzed by comparison to spectra for the corresponding conventionally‐polymerized polymer films [i.e., poly(hydroxyethyl methacrylate) and poly(acrylic acid)]. Acetone spectra were interpreted by reference to SIMS analysis of plasma‐deposited films prepared from isotopically‐labelled acetone and to reference homopolymers. Comparison of the SIMS spectra of films deposited at different substrate temperatures indicates that a reduction in substrate temperature generally results in higher intensity of peaks characteristic of oxygenated ion structures. SIMS also suggests that the reduction of substrate temperature results in less polymer unsaturation and fewer structures which form by hydrogen redistribution during the deposition process. These results support the hypothesis that deposition at low substrate temperatures leads to an increase in the proportion of precursor incorporated into the film without substantial fragmentation. Corroborative results from high resolution x‐ray photoelectron spectroscopy (XPS) and assays for precursor functional groups by chemical derivatization reactions in conjunction with XPS are also presented. © 1992 John Wiley & Sons, Inc. Copyright © 1992 John Wiley & Sons, Inc.

Duke Scholars

Published In

Journal of Polymer Science Part A: Polymer Chemistry

DOI

EISSN

1099-0518

ISSN

0887-624X

Publication Date

January 1, 1992

Volume

30

Issue

11

Start / End Page

2427 / 2441

Related Subject Headings

  • Polymers
  • 3406 Physical chemistry
  • 3403 Macromolecular and materials chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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López, G. P., Chilkoti, A., Briggs, D., & Ratner, B. D. (1992). Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry. Journal of Polymer Science Part A: Polymer Chemistry, 30(11), 2427–2441. https://doi.org/10.1002/pola.1992.080301117
López, G. P., A. Chilkoti, D. Briggs, and B. D. Ratner. “Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry.” Journal of Polymer Science Part A: Polymer Chemistry 30, no. 11 (January 1, 1992): 2427–41. https://doi.org/10.1002/pola.1992.080301117.
López GP, Chilkoti A, Briggs D, Ratner BD. Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry. Journal of Polymer Science Part A: Polymer Chemistry. 1992 Jan 1;30(11):2427–41.
López, G. P., et al. “Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry.” Journal of Polymer Science Part A: Polymer Chemistry, vol. 30, no. 11, Jan. 1992, pp. 2427–41. Scopus, doi:10.1002/pola.1992.080301117.
López GP, Chilkoti A, Briggs D, Ratner BD. Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry. Journal of Polymer Science Part A: Polymer Chemistry. 1992 Jan 1;30(11):2427–2441.
Journal cover image

Published In

Journal of Polymer Science Part A: Polymer Chemistry

DOI

EISSN

1099-0518

ISSN

0887-624X

Publication Date

January 1, 1992

Volume

30

Issue

11

Start / End Page

2427 / 2441

Related Subject Headings

  • Polymers
  • 3406 Physical chemistry
  • 3403 Macromolecular and materials chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry