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RECESSED GATE Al//0 //. //4 //8 In//0 //. //5 //2 As/Ga//0 //. //4 //7 In//0 //. //5 //3 As MODULATION DOPED FIELD EFFECT TRANSISTOR.

Publication ,  Journal Article
Itoh, T; Brown, AS; Camnitz, LH; Wicks, GW; Berry, JD; Eastman, LF
December 1, 1985

1- mu m gate Al//0 //. //4 //8 In//0 //. //5 //2 As/Ga//0 //. //4 //7 In//0 //. //5 //3 As modulation-doped field effect transistors have been successfully fabricated by using a recessed gate structure and an undoped Al//0 //. //4 //8 In//0 //. //5 //2 As top layer beneath the gate metal. The fabricated devices exhibited good dc characteristics with a high transconductance and a complete pinch-off characteristic. dc transconductances of 200 mS/mm and 265 mS/mm have been measured at 300K and 77K, respectively.

Duke Scholars

Publication Date

December 1, 1985

Start / End Page

92 / 101
 

Citation

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Publication Date

December 1, 1985

Start / End Page

92 / 101