InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment
Publication
, Journal Article
Losurdo, M; Giangregorio, MM; Lisco, F; Capezzuto, P; Bruno, G; Wolter, SD; Angelo, M; Brown, A
Published in: Journal of the Electrochemical Society
March 4, 2009
Oxide removal from InAs(100) surfaces was achieved using a combination of HF:methanol wet etching followed by atomic hydrogen treatment at a temperature as low as 100°C without any stabilizing As flux. The process was monitored in real-time exploiting spectroscopic ellipsometry. Following this treatment, the surface morphology was found to be very smooth at the nanometer scale, with a reduced effective oxide thickness and no appreciable levels of elemental In and As. Furthermore, we demonstrate stability of such surfaces against oxide reformation. © 2009 The Electrochemical Society.
Duke Scholars
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
March 4, 2009
Volume
156
Issue
4
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry
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ICMJE
MLA
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Losurdo, M., Giangregorio, M. M., Lisco, F., Capezzuto, P., Bruno, G., Wolter, S. D., … Brown, A. (2009). InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment. Journal of the Electrochemical Society, 156(4). https://doi.org/10.1149/1.3076194
Losurdo, M., M. M. Giangregorio, F. Lisco, P. Capezzuto, G. Bruno, S. D. Wolter, M. Angelo, and A. Brown. “InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment.” Journal of the Electrochemical Society 156, no. 4 (March 4, 2009). https://doi.org/10.1149/1.3076194.
Losurdo M, Giangregorio MM, Lisco F, Capezzuto P, Bruno G, Wolter SD, et al. InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment. Journal of the Electrochemical Society. 2009 Mar 4;156(4).
Losurdo, M., et al. “InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment.” Journal of the Electrochemical Society, vol. 156, no. 4, Mar. 2009. Scopus, doi:10.1149/1.3076194.
Losurdo M, Giangregorio MM, Lisco F, Capezzuto P, Bruno G, Wolter SD, Angelo M, Brown A. InAs(100) surfaces cleaning by an As-Free low-temperature 100°C treatment. Journal of the Electrochemical Society. 2009 Mar 4;156(4).
Published In
Journal of the Electrochemical Society
DOI
ISSN
0013-4651
Publication Date
March 4, 2009
Volume
156
Issue
4
Related Subject Headings
- Energy
- 4016 Materials engineering
- 3406 Physical chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry