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InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs

Publication ,  Journal Article
Wu, B; Wheeler, D; Yi, C; Yoon, I; Jha, S; Brown, A; Kuech, T; Fay, P; Seabaugh, A
Published in: 2007 International Semiconductor Device Research Symposium, ISDRS
December 1, 2007

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Published In

2007 International Semiconductor Device Research Symposium, ISDRS

DOI

Publication Date

December 1, 2007
 

Citation

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Wu, B., Wheeler, D., Yi, C., Yoon, I., Jha, S., Brown, A., … Seabaugh, A. (2007). InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs. 2007 International Semiconductor Device Research Symposium, ISDRS. https://doi.org/10.1109/ISDRS.2007.4422233
Wu, B., D. Wheeler, C. Yi, I. Yoon, S. Jha, A. Brown, T. Kuech, P. Fay, and A. Seabaugh. “InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs.” 2007 International Semiconductor Device Research Symposium, ISDRS, December 1, 2007. https://doi.org/10.1109/ISDRS.2007.4422233.
Wu B, Wheeler D, Yi C, Yoon I, Jha S, Brown A, et al. InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs. 2007 International Semiconductor Device Research Symposium, ISDRS. 2007 Dec 1;
Wu, B., et al. “InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs.” 2007 International Semiconductor Device Research Symposium, ISDRS, Dec. 2007. Scopus, doi:10.1109/ISDRS.2007.4422233.
Wu B, Wheeler D, Yi C, Yoon I, Jha S, Brown A, Kuech T, Fay P, Seabaugh A. InAs growth on submicron (100) SOI islands for InAs-Si composite channel MOSFETs. 2007 International Semiconductor Device Research Symposium, ISDRS. 2007 Dec 1;

Published In

2007 International Semiconductor Device Research Symposium, ISDRS

DOI

Publication Date

December 1, 2007