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Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Publication ,  Conference
Zara, JM; Izatt, JA; Rao, KD; Yazdanfar, S; Smith, SW
Published in: Proceedings - International Symposium on Biomedical Imaging
January 1, 2002

This paper describes the development of a new type of optical coherence tomography (OCT) probe using an electrostatic micromachine (MEMS) actuator. These devices consist of millimeter scale mirrors resting on micron scale polyimide hinges that are tilted using a linear MEMS actuator, the integrated force array (IFA). The IFA is a parallel network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated from polyimide on silicon wafers using photolithography. These scanners were designed, fabricated and tested for optical displacements at different frequencies and drive voltages. They were then used in the scanning arm of an experimental OCT imaging system to make preliminary images.

Duke Scholars

Published In

Proceedings - International Symposium on Biomedical Imaging

DOI

EISSN

1945-8452

ISSN

1945-7928

Publication Date

January 1, 2002

Volume

2002-January

Start / End Page

297 / 300
 

Citation

APA
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ICMJE
MLA
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Zara, J. M., Izatt, J. A., Rao, K. D., Yazdanfar, S., & Smith, S. W. (2002). Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator. In Proceedings - International Symposium on Biomedical Imaging (Vol. 2002-January, pp. 297–300). https://doi.org/10.1109/ISBI.2002.1029252
Zara, J. M., J. A. Izatt, K. D. Rao, S. Yazdanfar, and S. W. Smith. “Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator.” In Proceedings - International Symposium on Biomedical Imaging, 2002-January:297–300, 2002. https://doi.org/10.1109/ISBI.2002.1029252.
Zara JM, Izatt JA, Rao KD, Yazdanfar S, Smith SW. Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator. In: Proceedings - International Symposium on Biomedical Imaging. 2002. p. 297–300.
Zara, J. M., et al. “Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator.” Proceedings - International Symposium on Biomedical Imaging, vol. 2002-January, 2002, pp. 297–300. Scopus, doi:10.1109/ISBI.2002.1029252.
Zara JM, Izatt JA, Rao KD, Yazdanfar S, Smith SW. Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator. Proceedings - International Symposium on Biomedical Imaging. 2002. p. 297–300.

Published In

Proceedings - International Symposium on Biomedical Imaging

DOI

EISSN

1945-8452

ISSN

1945-7928

Publication Date

January 1, 2002

Volume

2002-January

Start / End Page

297 / 300