Rapid thermal annealing issues in silicon processing
Publication
, Conference
Fair, RB
Published in: TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS
January 1, 1996
Duke Scholars
Published In
TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS
ISBN
0-87339-331-7
Publication Date
January 1, 1996
Start / End Page
61 / 66
Location
ANAHEIM, CA
Publisher
MINERALS, METALS & MATERIALS SOC
Conference Name
1st Meeting on Transient Thermal Processing Techniques in Electronic Materials at the 1996 TMS Annual Meeting
Citation
APA
Chicago
ICMJE
MLA
NLM
Fair, R. B. (1996). Rapid thermal annealing issues in silicon processing. In N. M. Ravindra & R. K. Singh (Eds.), TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS (pp. 61–66). ANAHEIM, CA: MINERALS, METALS & MATERIALS SOC.
Fair, R. B. “Rapid thermal annealing issues in silicon processing.” In TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS, edited by N. M. Ravindra and R. K. Singh, 61–66. MINERALS, METALS & MATERIALS SOC, 1996.
Fair RB. Rapid thermal annealing issues in silicon processing. In: Ravindra NM, Singh RK, editors. TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS. MINERALS, METALS & MATERIALS SOC; 1996. p. 61–6.
Fair, R. B. “Rapid thermal annealing issues in silicon processing.” TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS, edited by N. M. Ravindra and R. K. Singh, MINERALS, METALS & MATERIALS SOC, 1996, pp. 61–66.
Fair RB. Rapid thermal annealing issues in silicon processing. In: Ravindra NM, Singh RK, editors. TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS. MINERALS, METALS & MATERIALS SOC; 1996. p. 61–66.
Published In
TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS
ISBN
0-87339-331-7
Publication Date
January 1, 1996
Start / End Page
61 / 66
Location
ANAHEIM, CA
Publisher
MINERALS, METALS & MATERIALS SOC
Conference Name
1st Meeting on Transient Thermal Processing Techniques in Electronic Materials at the 1996 TMS Annual Meeting