Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation
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Yang, C; Li, H; Chen, Y; Hu, J
Published in: Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC
January 1, 2020
Wafer inspection locates defects at early fabrication stages and traditionally focuses on pixel-level defects. However, there are very few solutions that can effectively detect largescale defects. In this work, we leverage Convolutional Neural Networks (CNNs) to automate the wafer inspection process and propose several techniques to preprocess and augment wafer images for enhancing our model's generalization on unseen wafers (e.g., from other fabs). Cross-fab experimental results of both wafer-level and pixel-level detections show that the F1 score increases from 0.09 to 0.77 and the Precision-Recall area under curve (PR AUC) increases from 0.03 to 0.62 using our proposed method.
Duke Scholars
Published In
Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC
DOI
Publication Date
January 1, 2020
Volume
2020-January
Start / End Page
145 / 150
Citation
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ICMJE
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Yang, C., Li, H., Chen, Y., & Hu, J. (2020). Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation. In Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC (Vol. 2020-January, pp. 145–150). https://doi.org/10.1109/ASP-DAC47756.2020.9045391
Yang, C., H. Li, Y. Chen, and J. Hu. “Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation.” In Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC, 2020-January:145–50, 2020. https://doi.org/10.1109/ASP-DAC47756.2020.9045391.
Yang C, Li H, Chen Y, Hu J. Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation. In: Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC. 2020. p. 145–50.
Yang, C., et al. “Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation.” Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC, vol. 2020-January, 2020, pp. 145–50. Scopus, doi:10.1109/ASP-DAC47756.2020.9045391.
Yang C, Li H, Chen Y, Hu J. Enhancing Generalization of Wafer Defect Detection by Data Discrepancy-aware Preprocessing and Contrast-varied Augmentation. Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC. 2020. p. 145–150.
Published In
Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC
DOI
Publication Date
January 1, 2020
Volume
2020-January
Start / End Page
145 / 150