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Integrated force array: positioning drive applications

Publication ,  Journal Article
Bobbio, SM; Goodwin-Johansson, S; DuBois, TD; Tranjan, FM; Smith, SW; Fair, RB; Ball, C; Jacobson, J; Bartlett, C; Eleyan, N; Makki, H; Gupta, R
Published in: Proceedings of SPIE - The International Society for Optical Engineering
January 1, 1996

Integrated Force Arrays (IFAs) are thin film membrane actuators that act as transfer devices for electrostatic force. They are capable of large amplitude motion and evidence significant energies per unit volume (eg. 8.2 erg/mm 3). Devices which use IFAs as drivers to scan PZT acoustic imaging transducers are under development and will be discussed here.

Duke Scholars

Published In

Proceedings of SPIE - The International Society for Optical Engineering

Publication Date

January 1, 1996

Volume

2722

Start / End Page

123 / 134

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
 

Citation

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Bobbio, S. M., Goodwin-Johansson, S., DuBois, T. D., Tranjan, F. M., Smith, S. W., Fair, R. B., … Gupta, R. (1996). Integrated force array: positioning drive applications. Proceedings of SPIE - The International Society for Optical Engineering, 2722, 123–134.
Bobbio, S. M., S. Goodwin-Johansson, T. D. DuBois, F. M. Tranjan, S. W. Smith, R. B. Fair, C. Ball, et al. “Integrated force array: positioning drive applications.” Proceedings of SPIE - The International Society for Optical Engineering 2722 (January 1, 1996): 123–34.
Bobbio SM, Goodwin-Johansson S, DuBois TD, Tranjan FM, Smith SW, Fair RB, et al. Integrated force array: positioning drive applications. Proceedings of SPIE - The International Society for Optical Engineering. 1996 Jan 1;2722:123–34.
Bobbio, S. M., et al. “Integrated force array: positioning drive applications.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 2722, Jan. 1996, pp. 123–34.
Bobbio SM, Goodwin-Johansson S, DuBois TD, Tranjan FM, Smith SW, Fair RB, Ball C, Jacobson J, Bartlett C, Eleyan N, Makki H, Gupta R. Integrated force array: positioning drive applications. Proceedings of SPIE - The International Society for Optical Engineering. 1996 Jan 1;2722:123–134.

Published In

Proceedings of SPIE - The International Society for Optical Engineering

Publication Date

January 1, 1996

Volume

2722

Start / End Page

123 / 134

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering