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CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES

Publication ,  Journal Article
SUBRAHMANYAN, R; MASSOUD, HZ; FAIR, RB
Published in: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
March 1, 1987
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Duke Scholars

Hisham Z. Massoud
Author Hisham Z. Massoud Electrical and Computer Engineering
Richard B. Fair
Author Richard B. Fair Electrical and Computer Engineering

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

March 1, 1987

Volume

134

Issue

3

Start / End Page

C124 / C125

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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SUBRAHMANYAN, R., MASSOUD, H. Z., & FAIR, R. B. (1987). CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 134(3), C124–C125.
SUBRAHMANYAN, R., H. Z. MASSOUD, and R. B. FAIR. “CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY 134, no. 3 (March 1, 1987): C124–25.
SUBRAHMANYAN R, MASSOUD HZ, FAIR RB. CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 1987 Mar 1;134(3):C124–5.
SUBRAHMANYAN, R., et al. “CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 134, no. 3, ELECTROCHEMICAL SOC INC, Mar. 1987, pp. C124–25.
SUBRAHMANYAN R, MASSOUD HZ, FAIR RB. CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ELECTROCHEMICAL SOC INC; 1987 Mar 1;134(3):C124–C125.

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

March 1, 1987

Volume

134

Issue

3

Start / End Page

C124 / C125

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry